Optimal Structural Design of a Magnetic Circuit for Vibration Harvesters Applicable in MEMS

The paper discusses the results of research into a vibration-powered milli- or micro generator (MG). The generator harvests mechanical energy at an optimum level, utilizing the vibration of its mechanical system. The central purpose of our report is to outline the parameters that are significant for implementing the actual design to harvest the maximum (optimum) energy possible within periodic symmetrical systems, while respecting the typical behavior of the output voltage. The relevant theoretical outcomes influence the measurability and evaluation of the physical quantities that characterize the designed structures. The given parameters, which are currently defined in millimeters, are also applicable within the micrometer range, or MEMS. The article compares some of the published microgenerator concepts and design versions by using effective power density, among other parameters, and it also brings complementary comments on the applied harvesting techniques. The authors demonstrate minor variations in the magnetic rotationally symmetric circuit geometry that affect the pattern of the device's instantaneous output voltage; in this context, the suitability of the individual design approaches that are to be used with MEMS as a vibration harvesting system is analyzed in terms of properties that are applicable in Industry 4.0.